Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen
نویسندگان
چکیده
منابع مشابه
Capacitively-coupled radio-frequency hydrogen discharges: the role of kinetics
This paper presents a systematic characterization of capacitively-coupled radio-frequency hydrogen discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf = 50− 600 V), frequencies (f = 13.56− 40.56 MHz), and pressures (p = 0.2− 1 torr). A twodimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to...
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ژورنال
عنوان ژورنال: Plasma Processes and Polymers
سال: 2007
ISSN: 1612-8850,1612-8869
DOI: 10.1002/ppap.200732303